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MEMS and Microsystem Design

Enrollment is Closed

About This Course

Course Objectives

1. To learn the fundamentals of MEMS & Micro System Design.

2. To present a general introduction to the field of MEMS, with emphasis on its commercial applications and device fabrication methods.

3. To learn about the new materials, science and technology for microsystem applications.

At the end of the course, student will know the fabrication technologies; material properties and structural mechanics; packaging, and MEMS markets and applications; and will be able to understand state-of-the-art micromachining and packaging technologies.


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Department of ECE

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