JILU GEORGE
Department of ECE
Course Objectives
1. To learn the fundamentals of MEMS & Micro System Design.
2. To present a general introduction to the field of MEMS, with emphasis on its commercial applications and device fabrication methods.
3. To learn about the new materials, science and technology for microsystem applications.
At the end of the course, student will know the fabrication technologies; material properties and structural mechanics; packaging, and MEMS markets and applications; and will be able to understand state-of-the-art micromachining and packaging technologies.
Add information about the skills and knowledge students need to take this course.
Department of ECE
Biography of instructor/staff member #2
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